| 发明名称 |
SYSTEM AND METHOD FOR NON-CONTACT MICROSCOPY FOR THREE-DIMENSIONAL PRE-CHARACTERIZATION OF A SAMPLE FOR FAST AND NON-DESTRUCTIVE ON SAMPLE NAVIGATION DURING NANOPROBING |
| 摘要 |
A system for performing sample probing. The system including an topography microscope configured to receive three-dimensional coordinates for a sample based on at least three fiducial marks; receive the sample mounted in a holder; and navigate to at least a location on the sample based on the at least three fiducial marks and the three-dimensional coordinates. |
| 申请公布号 |
US2015301078(A1) |
申请公布日期 |
2015.10.22 |
| 申请号 |
US201414552399 |
申请日期 |
2014.11.24 |
| 申请人 |
DCG Systems, Inc. |
发明人 |
Ukraintsev Vladimir A.;Stallcup Richard;Pryadkin Sergiy;Berkmyre Mike;Sanders John |
| 分类号 |
G01Q10/02;G01Q30/02 |
主分类号 |
G01Q10/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A system for performing sample probing, comprising:
an topography microscope configured to:
receive three-dimensional coordinates for a sample based on at least three fiducial marks;receive said sample mounted in a holder; andnavigate to at least a location on said sample based on said at least three fiducial marks and said three-dimensional coordinates. |
| 地址 |
Fremont CA US |
