PERMEABILITY EVALUATION METHOD

摘要

A permeability evaluation method for evaluating the permeability of a test piece with respect to heavy-metal ions. Said permeability evaluation method includes a step in which, with a first liquid that contains heavy-metal ions and a second liquid that contains water and an organic solvent separated by the test piece, a voltage is applied between a positive electrode provided on the first-liquid side and a negative electrode provided on the second-liquid side and the amount of current flowing between said electrodes is measured. The test piece contains an insulating material used in semiconductor manufacturing, and the concentration of heavy-metal ions in the first liquid is at least 0.5 mg/kg.