SUBSTRATE PROCESSING APPARATUS

摘要

PROBLEM TO BE SOLVED: To inhibit the chemical atmosphere from being dispersed around a processing tank.SOLUTION: A substrate processing apparatus includes: a processing tank in which a substrate retained in a substrate holder is housed and which is used for processing the substrate; a lifter which supports the substrate holder and is constituted so that the substrate holder is housed in the processing tank and is taken out from the processing tank; and a cover is constituted so as to cover the periphery of the substrate holder taken out from the processing tank with the lifter.