发明名称 FORCE DETECTION DEVICE AND ROBOT
摘要 PROBLEM TO BE SOLVED: To provide a force detection device having excellent detection accuracy and capable of reducing influence on a temperature drift, and a robot.SOLUTION: A force detection device 1 comprises: a first base 2; a second base 3 arranged along a first direction with respect to the first base 2; a sealing member 9 which is provided in the portion in which the first base 2 overlaps the second base 3 when viewed from a second direction orthogonal to the first direction and which forms a closed space together with the first base 2 and the second base 3; and a piezoelectric element provided in the closed space. The modulus of longitudinal elasticity of the sealing member 9 is higher than the modulus of longitudinal elasticity of the first base 2 and the modulus of longitudinal elasticity of the second base 3.
申请公布号 JP2015184005(A) 申请公布日期 2015.10.22
申请号 JP20140057663 申请日期 2014.03.20
申请人 SEIKO EPSON CORP 发明人 ARAKAWA YUTAKA
分类号 G01L1/16;G01L5/16 主分类号 G01L1/16
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