| 摘要 |
A thermo-optic phase shifter (100, 200, 300) comprises a substrate (1), a clad layer (2) disposed on the substrate (1), a waveguide core layer (3) located in the clad layer (2), a temperature controller (4, 11), and a heater (5, 10) for heating the waveguide core layer (3). The temperature controller (4, 11) and the heater (5, 10) are disposed in a spaced manner. The temperature controller (4, 11) is disposed on the periphery of the waveguide core layer (3) and is used for reducing the temperature of the waveguide core layer (3). According to the thermo-optic phase shifter, by adding the temperature controller (4, 11), the temperature of the waveguide core layer (3) can be rapidly reduced after temperatures of the waveguide core layer (3) and the clad layer (2) increase or the temperatures increase and need to be reduced, so that the thermal crosstalk of surrounding components can be eliminated when the temperature of the waveguide core layer (3) increases, the response of the thermo-optic phase shifter (100, 200, 300) is accelerated, the structure is simple, and the performance is reliable. |
