发明名称 |
MEMS DEVICES HAVING DISCHARGE CIRCUITS |
摘要 |
MEMS devices having discharge circuits. In some embodiments, a MEMS device can include a substrate and an electromechanical assembly implemented on the substrate. The MEMS device can further include a discharge circuit implemented relative to the electromechanical assembly. The discharge circuit can be configured to provide a preferred arcing path during a discharge condition affecting the electromechanical assembly. The MEMS device can be, for example, a switching device, a capacitance device, a gyroscope sensor device, an accelerometer device, a surface acoustic wave (SAW) device, or a bulk acoustic wave (BAW) device. The discharge circuit can include a spark gap assembly having one or more spark gap elements configured to facilitate the preferred arcing path. |
申请公布号 |
WO2015160723(A1) |
申请公布日期 |
2015.10.22 |
申请号 |
WO2015US25620 |
申请日期 |
2015.04.13 |
申请人 |
SKYWORKS SOLUTIONS, INC. |
发明人 |
MASON, JEROD F.;BARTLE, DYLAN CHARLES;WHITEFIELD, DAVID SCOTT;PETZOLD, DAVID T.;GUNES, DOGAN;DICARLO, PAUL T. |
分类号 |
B81B7/02;G01C19/56;G01P15/00;G01P15/14;H01H1/00;H03H9/02;H03H9/25 |
主分类号 |
B81B7/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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