| 摘要 |
PROBLEM TO BE SOLVED: To achieve a wire-saw dicing method that has high productivity and can be automated, and suppress costs for a member that fixes a cut member.SOLUTION: An adhesive member 1 for temporary fixation for a wire-saw dicing method has an adhesion layer 11 for temporarily fixing a cut member on at least one face of a flat plate-like object 12. By using the adhesive member 1 for temporary fixation having previously the adhesion layer 11 on the plate-like object 12, an adhesive manual application process for the adhesive for temporary fixation in the wire-saw dicing method and a process for alignment between the cut member and the flat plate-like object (a pedestal) can be omitted, and a process that is an obstacle in reduction of working time and automation can be omitted; and further a groove needs not to be formed. By using the flat plate-like object having high convenience, the adhesive member becomes economical in terms of total costs. |
