| 摘要 |
<p>PROBLEM TO BE SOLVED: To detect the form of a material gas, i.e., the fluid in the piping, by temperature change of the piping.SOLUTION: A state detector includes: a carburetor for vaporizing liquid raw material; gas supply piping connected with the carburetor and supplying the vaporized raw material gas to a processing chamber; a piping heater provided to surround the gas supply piping, and heating the raw material gas in the gas supply piping; a temperature measuring instrument provided between the gas supply piping and piping heater, and measuring the temperature of the gas supply piping surface; and a control unit connected with the temperature measuring instrument, monitoring the amount of temperature change of the temperature measuring instrument for a certain period of time, and when the amount of change is larger than a predetermined amount of temperature change, controlling the carburetor so as to stop gas supply.</p> |
