发明名称 Photosensitive Resin Composition, Resist Laminate, And Cured Product (2) Thereof
摘要 The purpose of the present invention is to provide: a photosensitive epoxy resin composition and/or a resist laminate of said resin composition that makes it possible to use photolithography to form an image having a vertical sidewall shape and fine resolution, low stress, and heat/humidity resistance; and a cured product of said resin composition and said resist laminate. The present invention is a photosensitive resin composition comprising: (A) an epoxy resin; (B) a polyphenol compound having a specific structure; (C) a photocationic polymerization initiator; and (D) an epoxy group-containing silane compound. The epoxy resin (A) comprises: an epoxy resin (a) obtained by reacting a phenol derivative that is represented by formula (1) with an epihalohydrin; and an epoxy resin (b) that is represented by formula (2).;
申请公布号 US2015301450(A1) 申请公布日期 2015.10.22
申请号 US201314437940 申请日期 2013.10.25
申请人 NIPPON KAYAKU KABUSHIKI KAISHA 发明人 Imaizumi Naoko;Inagaki Shinya;Honda Nao
分类号 G03F7/038 主分类号 G03F7/038
代理机构 代理人
主权项 1. A photosensitive resin composition comprising: an epoxy resin (A), a polyhydric phenol compound (B), a cationic photopolymerization initiator (C), and an epoxy group-containing silane compound (D); wherein the epoxy resin (A) comprises an epoxy resin (a) obtained from reaction of a phenol derivative represented by the following Formula (1) and epihalohydrin: and an epoxy resin (b) represented by the following Formula (2): wherein m is an average value, representing a real number in the range from 2 to 30, R1 and R2 each independently represent a hydrogen atom, an alkyl group having 1 to 4 carbon atoms, or a trifluoromethyl group, each X independently represents a hydrogen atom or a glycidyl group, and at least one of a plurality of X present is a glycidyl group; and the polyhydric phenol compound (B) comprises one or more selected from the group consisting of phenol compounds represented by the following Formulas (3) to (6): wherein p is an average value, representing a real number in the range from 1 to 10, and each R independently represents a hydrogen atom or an alkyl group having 1 to 4 carbon atoms; wherein q is an average value, representing a real number in the range from 1 to 10; wherein z is an average value, representing a real number in the range from 1 to 10; wherein y is an average value, representing a real number in the range from 1 to 10, and R8 and R9 each independently represent a hydrogen atom or an alkyl group having 1 to 4 carbon atoms.
地址 Chiyoda-ku, Tokyo JP