发明名称 |
SEMICONDUCTOR ELEMENT, ELECTRIC APPARATUS, BIDIRECTIONAL FIELD EFFECT TRANSISTOR, AND MOUNTING STRUCTURAL BODY |
摘要 |
Provided is a small-loss semiconductor element using polarization super junction, said semiconductor element being capable of easily breaking a tradeoff relationship between withstand voltage increase and speed increase, eliminating current collapse, while increasing a withstand voltage, and being capable of performing high-speed operations. This semiconductor element has a polarization super-junction region, and a p electrode contact region. The polarization super-junction region has: an undoped GaN layer (11); an undoped AlxGa1-xN layer (12) having a thickness of 25-47 nm, 0.17≤x≤0.35; an undoped GaN layer (13); and a p-type GaN layer (14). When conversion thickness (tR) is defined as tR=u+v(1+w×10-18), where, a thickness of the undoped GaN layer (13) is represented by u [nm], a thickness of the p-type GaN layer (14) is represented by v [nm], and Mg concentration is represented by w [cm-3], the following formula is satisfied: tR≥0.864/(x-0.134)+46.0 [nm]. The p electrode contact region has: a p-type GaN contact layer that is provided in contact with the p-type GaN layer (14); and a p electrode in ohmic contact with the p-type GaN contact layer. |
申请公布号 |
WO2015159450(A1) |
申请公布日期 |
2015.10.22 |
申请号 |
WO2014JP80436 |
申请日期 |
2014.11.18 |
申请人 |
POWDEC K.K. |
发明人 |
ECHIGOYA, SHOKO;NAKAMURA, FUMIHIKO;YAGI, SHUICHI;MATSUMOTO, SOUTA;KAWAI, HIROJI |
分类号 |
H01L21/338;H01L21/329;H01L21/337;H01L27/098;H01L29/06;H01L29/778;H01L29/808;H01L29/812;H01L29/861;H01L29/868 |
主分类号 |
H01L21/338 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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