| 摘要 |
The present invention relates to a plasma reactor, and more specifically, to a plasma reactor arranged between a process chamber and a vacuum pump so as to dissolve exhaust gas discharged from the process chamber, comprising: a tube through which the exhaust gas flows; a plasma generation means, which is provided on the tube, for dissolving the exhaust gas by causing plasma electric discharge; a housing which surrounds the tube and creates a separated space between the housing and the outer circumferential surface of the tube; a detection means for detecting environment conditions in the tube or in the separated space; and a control unit for determining the state of the tube or the separated space based on information on the environment conditions received from the detection means. |
