TEMPERATURE MEASUREMENT DEVICE AND TEMPERATURE MEASUREMENT METHOD

摘要

PROBLEM TO BE SOLVED: To provide a temperature measurement device and a temperature measurement method capable of accurately measuring the temperature of a measurement object having permeability with respect to radiation energy in a specific wavelength band by using a radiation thermometer.SOLUTION: A control part 10 includes: a relational expression calculation part 11 for calculating a relational expression indicating a relation between an error between the temperature of a silicon wafer measured by a radiation thermometer 3 and the actual temperature of the silicon wafer and the temperature of a reflector; a relational expression storage part 12 for storing the relational expression; and a temperature correction part 13 for correcting the temperature of the silicon wafer measured by the radiation thermometer 3 by using the relational expression.