| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a thickness measuring method, a thickness measuring system, and a manufacturing method of a laminated body which are capable of improving a measuring accuracy of the thickness of respective layers in the laminated body.SOLUTION: A thickness measuring method sets a refractive index difference among respective layers neighboring to a laminated body 1 having a plurality of layers to 0.020 or greater, and measures the thickness of the respective layers of the laminated body 1 using the spectral interference system. A thickens measuring system 200 includes: the laminated body 1 in which a refractive index difference among the neighboring respective layers is 0.020 or greater; a light source 21 for radiating a light beam to the laminated body 1; a spectrometer 22 which disperses the light beam reflected from the laminated body 1; and an analyzer 23 for analyzing a waveform dispersed by the spectrometer 22. The manufacturing method of the laminated body laminates a plurality of layers so that the refractive index difference among the respective neighboring layers is 0.020 or greater.</p> |
