| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a force detection device having high accuracy of force detection and high reliability, a robot, an electronic component conveyance device, and an electronic component inspection device.SOLUTION: The force detection device comprises a first base part, a second base part, a piezoelectric element for outputting a signal in accordance with an external force, a sensor device having a package in which the piezoelectric element is stored, a circuit board provided on the outside of the sensor device, and a communication unit for performing contactless communication between the sensor device and the circuit board. Each of the sensor device and the circuit board is provided between the first base part and the second base part.</p> |
