METHODS AND APPARATUS FOR CLEANSPACE FABRICATORS

摘要

The present disclosure provides various apparatus and methods for novel cleanspace fabricator designs. In some examples, a cleanspace fabricator may be comprised of vertically stacked tools wherein the product and the processing tools are conveyed through the cleanspace. In another example, a fabricator is formed and utilized wherein at least a portion of the fabricator may be comprised of vertically stacked tools that occupy a peripheral position on a cleanspace and wherein at least a portion of the fabricator is comprised of horizontally deployed tools in a cleanroom environment. Product may be comprised of or processed upon substrates in some examples. In other examples product may be comprised of materials contained within vessels. In some examples the product within vessels may be in liquid or powder form.

主权项

1) A method for processing a product; the method comprising:
accessing a fabricator comprising at least a first vertically deployed cleanspace, at least a first tool chassis and at least a first toolPod attached to the first tool chassis; processing a first product in the first toolPod; and handling the first product at a toolport of the first toolPod within the first vertically deployed cleanspace.