PUMP PROVIDED WITH AN ASSEMBLY FOR MEASURING THE TEMPERATURE OR FLOW RATE OF A FLUID

摘要

A pump including a first substrate in a plane with a side having a cavity formed therein. There are intake and discharge channels in the side for admitting and discharging a fluid. There is a second substrate having a side joined to the first substrate, to close the channels and form tubes in which pumped fluid flows. The second substrate also has a membrane to close the cavity to form a leak-tight chamber. The membrane is deformable: in order to expel the fluid out of the chamber via the discharge channel, and to suck the fluid into the chamber via the intake channel. There is actuator capable of converting the energy into movement of the membrane and an assembly for measuring the temperature/flow rate of the fluid. There is a temperature probe placed on the exterior side of the insulating material to insulate thermally the probe from the substrate.