EXPOSING APPARATUS AND METHOD FOR FIXING THE SAME

摘要

Provided is a light exposure device, capable of performing high-accuracy light exposure. A light exposure device comprises: an array element for arranging an optical element in a 2D form; a holder for maintaining the array element; a projection optical system for imaging light through the array element on a photosensitive material; a fixed unit wherein a position with respect to the projection optical system is fixed for the holder to be fixed; a fixture for fixating the holder on the fixed unit; and a concave unit installed on at least one side of the holder and the fixed unit, for maintaining the holder on the fixed unit with adsorption.