| 摘要 |
<p>This fluid control device is provided with a pressure sensor (30) and/or a temperature sensor (40), and a controller (50). The controller (50) is configured so as to perform a closed valve fully closing operation in which a drive unit (10) is driven to a closed valve bottom dead center at which a valve seat (25) and/or a valve sheet (22) is brought into a compressed and deformed state after the valve sheet (22) is brought into contact with the valve seat (25), and, from the value sensed by the pressure sensor (30) and/or the temperature sensor (40), determine whether or not to perform a shutoff stress relief operation in which the drive unit (10) is driven such that the stress between the valve sheet (22) and the valve seat (25) is relieved within the range in which the valve sheet (22) maintains the contact state with the valve seat (25) after the closed valve fully closing operation.</p> |
