发明名称 LIQUID SUPPLY SYSTEM
摘要 Provided is a liquid supply system that can suppress a functional decline of relief valves and improve cooling efficiency. The system is characterized by including a sealed container (110), a pump (120) disposed in a cryogenic liquid (L) contained inside the sealed container (110) and driven by a linear actuator (130), a first conduit (K1) for directing the cryogenic liquid (L) pumped out by the pump (120) to a cooled device (300) provided outside the sealed container (110), a second conduit (K2) for returning the cryogenic liquid (L) from the cooled device (300) into the sealed container (110), and a relief valve (170) that is connected to the first conduit (K1) within the sealed container (110) and releases the cryogenic liquid (L) into the sealed container (110).
申请公布号 EP2933585(A1) 申请公布日期 2015.10.21
申请号 EP20130862998 申请日期 2013.11.14
申请人 EAGLE INDUSTRY CO., LTD. 发明人 MORI KOICHI;FURUTA KIYOTAKA
分类号 F25B9/00;F25D3/10;F25D17/02;F25D29/00;H01L23/44 主分类号 F25B9/00
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