| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a variable spectroscope capable of accurately moving an optical substrate at high speed in a range from initial spacing to a spacing required for wavelength control. <P>SOLUTION: A variable spectroscope comprises: a pair of optical substrates 1 and 1'; a sensor 2 for detecting electrostatic capacity between the optical substrates; an actuator 3 for changing spacing between the optical substrates; a target value generation part 4 for the spacing of the pair of optical substrates; a spacing detection part 5 for detecting a current value of the spacing between the pair of optical substrates; a drive amount calculation part 6 for calculating a drive amount of the pair of optical substrates by PID control on the basis of a difference value between the target value and the current value of the spacing between the pair of optical substrates; and a drive command part 7 capable of applying a drive voltage to the actuator on the basis of the calculated drive amount. The variable spectroscope includes a drive control method switching part 8 that makes drive control methods for the pair of optical substrates different between until and after the current value of the spacing between the pair of optical substrates, which is detected by the spacing detection part, reaches a predetermined spacing required for wavelength control from the initial spacing. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
