| 摘要 |
<p>Disclosed is a method for producing a gas barrier film, wherein a coating liquid containing a polysilazane is applied and a VUV treatment is carried out, and which prevents incorporation of a modification-inhibiting adsorbate into the coating film, thereby further improving the gas barrier performance. In the method for producing a gas barrier film, a coating film is formed by applying a coating liquid that contains a polysilazane over the surface of a film, and after having the resulting film pass through a drying zone, the film is irradiated with vacuum ultraviolet light from the coating film side and modified. The method for producing a gas barrier film is characterized in that an inert gas is supplied into the drying zone so that the oxygen concentration therein is 10% or less.</p> |
