发明名称 隔膜型圧力計
摘要 A pressure gauge includes a first sensor for detecting a pressure in a first range, a second sensor for detecting a pressure in a second range, and a processing unit for determining a pressure value based on outputs from the first sensor and the second sensor. The first and the second ranges have an overlapping range, an upper limit of the second range is higher than that of the first range, the processing unit determines a correction value based on outputs from the first sensor and the second sensor when a pressure falls within the overlapping range, and the processing unit determines a pressure value based on an output from the second sensor and the correction value, when measuring, by using the second sensor, a pressure in the second range, higher than that of the first pressure range.
申请公布号 JP5798194(B2) 申请公布日期 2015.10.21
申请号 JP20130537386 申请日期 2012.09.12
申请人 キヤノンアネルバ株式会社 发明人 宮下 治三
分类号 G01L9/00;G01L21/00;H01L29/84 主分类号 G01L9/00
代理机构 代理人
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