| 摘要 |
<p>The invention provides a method for generating a reference mark model template which can generate a reference mark model template of a circuit base material without error. The model template is generated by a reference mark alternate extraction process, a mark kind determination process and a template forming process, wherein the reference mark alternating extraction process forms the periphery of a scheduled position by shooting a reference mark of the circuit base material by a shooting device and extracts an image with high possibility of being a reference mark, i.e., a reference mark alternate from the obtained images; the mark kind determination process determines which kind of the extracted reference mark is among a plurality of prescribed reference marks; and the template forming process forms a model template for the reference mark with determined kind. The reference mark alternate extraction process extracts a reference mark alternate through a layer type AdaBoost detector with Haar characteristics; the mark kind determination process determines the type of a mark through the neural network.</p> |
