| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an electron beam irradiation device capable of preventing a widow member and a window frame from getting a high temperature. <P>SOLUTION: An electron beam irradiation device 1 comprises: an electron gun 40 for emitting an electron beam EB; a scanner tube 33 that has a receiving-side opening 33a for receiving the electron beam EB emitted by the electron gun 40 and an emitting-side opening 33b for emitting the electron beam EB; and an electron beam transmission unit 50 disposed at the emitting-side opening 33b. The electron beam transmission unit 50 has a window frame 50A attached to the emitting-side opening 33b and a window member 55 that is disposed inside the window frame 50A and allows the electron beam EB having passed through the inside of the scanner tube 33 to pass therethrough. The thermal conductivity of the window frame 50A is higher than the thermal conductivity of the scanner tube 33. <P>COPYRIGHT: (C)2013,JPO&INPIT</p> |
