A method for manufacturing a device substrate comprises the following steps of: arranging a process substrate on a carrier substrate; forming a device on the process substrate; separating a part of the process substrate from the carrier substrate; providing a static electricity eliminating member between the process substrate and the carrier substrate; and separating the process substrate from the carrier substrate.
申请公布号
KR20150117769(A)
申请公布日期
2015.10.21
申请号
KR20140043133
申请日期
2014.04.10
申请人
SAMSUNG DISPLAY CO., LTD.
发明人
KIM, TAE HWAN;LEE, BO RAM;LEE, JONG HWAN;KIM, SANG IL