发明名称 A METHOD OF PREVENTING PATTERN COLLAPSE
摘要 A device comprises a substrate and at least three conductive characteristic parts embedded inside the substrate. Each conductive characteristic part includes upper width of x and lower width of y, while upper width and lower width (x1, y1) of a first conductive characteristic part has a dimension of x1<y1, upper width and lower width (x2, y2) of a first conductive characteristic part has a dimension of x2<y2, x2=y2 or x2>y2, and upper width and lower width (x3, y3) of a first conductive characteristic part has a dimension of x3>y3. The device also includes a gap structure separating the first conductive characteristic part and the second conductive characteristic part. The gap structure may include things such as air or a dielectric substance.
申请公布号 KR101562108(B1) 申请公布日期 2015.10.20
申请号 KR20130129035 申请日期 2013.10.29
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD. 发明人 TING CHIH YUAN;WU CHUNG WEN;CHEN JENG SHIOU;TSAI JANG SHIANG;SHIEH JYU HORNG
分类号 H01L21/322 主分类号 H01L21/322
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