Method for connecting a plurality of unpackaged substrates

摘要

A plurality of unpackaged substrates connected to one another is disclosed. The stepped structures on and/or in a first main area of a first substrate include a plurality of integrated circuits. The stepped structures run between the integrated circuits. The first conductor tracks extend from at least some contact connections of the respective integrated circuits as far as the stepped structures. The first substrate is connected on the side of the first main area to a further substrate. The first substrate is severed from a second main area opposite to the first main area such that the first substrate is divided into a plurality of substrate pieces. Each substrate piece has one of the integrated circuits. The first conductor tracks are accessible in interspaces between the substrate pieces. The second conductor tracks are formed from the second main area. At least some of the second conductor tracks lead from the second main area over side walls of the substrate pieces as far as the first conductor tracks.

主权项

1. A method for connecting a plurality of unpackaged substrates to one another, the method comprising:
forming stepped structures on and/or in a first main area of a first substrate having a plurality of integrated circuits, wherein the stepped structures run between the integrated circuits; forming first conductor tracks extending from at least some contact connections of the respective integrated circuits as far as the stepped structures and covering side flanks of the stepped structures; connecting the first substrate on a side of the first main area to a further substrate; severing the first substrate from a second main area opposite to the first main area such that the first substrate is divided into a plurality of substrate pieces, each substrate piece having one of the integrated circuits, wherein the first conductor tracks become accessible in interspaces between the substrate pieces; and forming second conductor tracks from the second main area such that a material of the second conductor tracks is deposited directly onto the first conductor tracks that covered of the side flanks, wherein at least some of the second conductor tracks lead from the second main area over side walls of the substrate pieces as far as the first conductor tracks.