发明名称 In-line stacking of transistors for soft error rate hardening
摘要 Each one of a pair of CMOS transistors is formed in its own island and a gate terminal for each transistor is formed by a single, in-line conductor connecting both gate terminals together. This type of “in-line” connection achieves nearly a five-time improvement in the reduction of the ability of ionizing radiation particles to strike both transistors at the same time as compared to prior art “side-by-side” transistor stacking through use of a relatively smaller solid angle spanning the two transistors. This results in “hardening” of the transistors and improving their resistance to single event upsets and, thus, improving the soft error rate (SER) of the transistors.
申请公布号 US9165917(B2) 申请公布日期 2015.10.20
申请号 US200912473409 申请日期 2009.05.28
申请人 GLOBALFOUNDRIES INC. 发明人 Cannon Ethan H.;Heidel David F.;Muller K. Paul;Wang Alicia
分类号 H01L27/11;H01L27/02;H01L21/8238;H01L27/092 主分类号 H01L27/11
代理机构 Cantor Colburn LLP 代理人 Cantor Colburn LLP
主权项 1. A method of forming a cross coupled inverter storage element, comprising: forming four pairs of redundant transistors laid out in an in-line arrangement, a first pair of the four pairs of redundant transistors including a first transistor and a second transistor, the forming the first pair of transistors including: forming the first transistor in a first semiconductor island;forming the second transistor in a second semiconductor island,wherein the second semiconductor island is separate from the first semiconductor island,wherein the first and second semiconductor islands are arranged in an in-line stacking configuration that reduces a probability of an ionizing radiation particle striking the first transistor or the second transistor, andwherein the striking of the first transistor or the second transistor by the ionizing radiation particle causes a single event upset to occur; andproviding each gate terminal conductor for each of the first transistor and the second transistor as a contiguous straight line,wherein the contiguous straight line provides a reduced solid angle spanning twenty five degrees for the ionizing radiation particle to travel between the first transistor and the second transistor,wherein the reduced solid angle spanning twenty five degrees prevents the single event upset from occurring.
地址 Grand Cayman KY