发明名称 Semiconductor package and method of fabricating the same
摘要 A semiconductor package and a method of fabricating the same. The method may include mounting a lower stack including a plurality of lower semiconductor chips on a substrate and mounting an upper stack including a plurality of upper semiconductor chips on the lower stack. According to example embodiments of the inventive concept, the semiconductor package can be easily fabricated.
申请公布号 US9165916(B2) 申请公布日期 2015.10.20
申请号 US201414326631 申请日期 2014.07.09
申请人 Samsung Electronics Co., Ltd. 发明人 Chung Hyunsoo;Baek Seungduk;Lee In-Young;Cho Tae-Je
分类号 H01L21/44;H01L21/48;H01L25/00;H01L25/065;H01L23/48;H01L23/29;H01L21/56;H01L23/00;H01L23/31 主分类号 H01L21/44
代理机构 Ellsworth IP Group PLLC 代理人 Ellsworth IP Group PLLC
主权项 1. A method of fabricating a semiconductor package, comprising: stacking a plurality of lower semiconductor chips to form a lower stack; mounting the lower stack on a substrate; forming a lower mold layer on the substrate to enclose a side surface of the lower stack and to expose a top surface of the lower stack; mounting an upper stack including a plurality of upper semiconductor chips on the lower stack having the side surface enclosed by the lower mold layer; wherein the mounting of the lower stack comprises providing lower solder balls on a bottom surface of the lower stack and performing a reflow process to a structure with the lower solder balls to form lower connecting portions that are disposed between the substrate and the lower stack and are electrically connected to the substrate; and wherein the forming of the lower stack comprises preparing a first semiconductor substrate, on which a first semiconductor chip formed with first through vias is provided; mounting a second semiconductor chip with second through vias, on the first semiconductor chip of the first semiconductor substrate; and performing a separation process to the first semiconductor substrate to form the lower stack including the first and second semiconductor chips that are sequentially stacked.
地址 Suwon-si KR