发明名称 Fabrication method of packaging substrate
摘要 A fabrication method of a packaging substrate includes: providing a metal board having a first surface and a second surface opposite to the first surface, wherein the first surface has a plurality of first openings for defining a first core circuit layer therebetween, the second surface has a plurality of second openings for defining a second core circuit layer therebetween, each of the first and second openings has a wide outer portion and a narrow inner portion, and the inner portion of each of the second openings is in communication with the inner portion of a corresponding one of the first openings; forming a first encapsulant in the first openings; forming a second encapsulant in the second openings; and forming a surface circuit layer on the first encapsulant and the first core circuit layer.
申请公布号 US9165789(B2) 申请公布日期 2015.10.20
申请号 US201514643444 申请日期 2015.03.10
申请人 Siliconware Precision Industries Co., Ltd. 发明人 Ho Chi-Ching;Yu Yu-Chih;Tsai Ying-Chou
分类号 H01L21/50;H01L21/48;H01L21/56 主分类号 H01L21/50
代理机构 Mintz Levin Cohn Ferris Glovsky and Popeo, P.C 代理人 Mintz Levin Cohn Ferris Glovsky and Popeo, P.C ;Corless Peter F.;Jensen Steven M.
主权项 1. A fabrication method of a packaging substrate, comprising the steps of: providing a metal board having a first surface and a second surface opposite to the first surface and forming a plurality of second openings in the second surface of the metal board so as to define a second core circuit layer between the second openings, wherein each of the second openings has a wide outer portion and a narrow inner portion; forming a second encapsulant in the second openings; forming a plurality of first openings in the first surface of the metal board so as to define a first core circuit layer between the first openings, wherein each of the first openings has a wide outer portion and a narrow inner portion, and the inner portion of each of the first openings is in communication with the inner portion of a corresponding one of the second openings; forming a first encapsulant on the first surface and in the first openings and forming a plurality of openings in the first encapsulant for exposing the first core circuit layer; and forming a surface circuit layer on the first encapsulant and in the openings of the first encapsulant such that the surface circuit layer electrically connects the first core circuit layer.
地址 Taichung TW