发明名称 Cleaning composition and cleaning method using the same
摘要 A cleaning composition is provided. The cleaning composition includes at least one polyamino-polycarboxylic acid or at least one salt thereof, at least one solvent, at least one substituted or non-substituted phenethylamine and water. The solvent is selected from a group consisting of glycols.
申请公布号 US9165760(B2) 申请公布日期 2015.10.20
申请号 US201314054833 申请日期 2013.10.16
申请人 UWIZ Technology Co., Ltd. 发明人 Fu Yu-Chi;Tsai Wen-Tsai;Lu Ming-Hui;Chang Song-Yuan
分类号 H01L21/02;C11D7/26;C11D7/32;C11D7/50;C11D11/00 主分类号 H01L21/02
代理机构 Jianq Chyun IP Office 代理人 Jianq Chyun IP Office
主权项 1. A cleaning composition, the cleaning composition comprising: at least one polyamino-polycarboxylic acid or at least one salt thereof; at least one solvent, wherein the solvent is selected from a group consisting of glycols; and at least one substituted or unsubstituted phenethylamine; and water.
地址 Taoyuan TW