| 发明名称 | Mass transfer tool | ||
| 摘要 | Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool includes an articulating transfer head assembly, a carrier substrate holder, and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. The articulating transfer head assembly may include an electrostatic voltage source connection and a substrate supporting an array of electrostatic transfer heads. | ||
| 申请公布号 | US9162880(B2) | 申请公布日期 | 2015.10.20 |
| 申请号 | US201213607031 | 申请日期 | 2012.09.07 |
| 申请人 | LuxVue Technology Corporation | 发明人 | Higginson John A.;Bibl Andreas;Albertalli David |
| 分类号 | H01L21/683;H01T23/00;B81C99/00 | 主分类号 | H01L21/683 |
| 代理机构 | Blakely, Sokoloff, Taylor & Zafman LLP | 代理人 | Blakely, Sokoloff, Taylor & Zafman LLP |
| 主权项 | 1. A mass transfer tool comprising: an articulating transfer head assembly, including: an electrostatic voltage source connection,a substrate supporting an array of electrostatic transfer heads, anda mounting surface, wherein the substrate is releasably attachable to the mounting surface and electrically connectable with the electrostatic voltage source connection; a carrier substrate holder; and an actuator assembly to adjust a spatial relationship between the articulating transfer head assembly and the carrier substrate holder. | ||
| 地址 | Santa Clara CA US | ||