| 发明名称 | Tunable cavity resonator including a plurality of MEMS beams | ||
| 摘要 | A tunable cavity resonator includes a substrate, a cap structure, and a tuning assembly. The cap structure extends from the substrate, and at least one of the substrate and the cap structure defines a resonator cavity. The tuning assembly is positioned at least partially within the resonator cavity. The tuning assembly includes a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator. | ||
| 申请公布号 | US9166271(B2) | 申请公布日期 | 2015.10.20 |
| 申请号 | US201313908201 | 申请日期 | 2013.06.03 |
| 申请人 | Purdue Research Foundation | 发明人 | Peroulis Dimitrios;Fruehling Adam;Small Joshua Azariah;Liu Xiaoguang;Irshad Wasim;Arif Muhammad Shoaib |
| 分类号 | H01P5/08;H03H7/38;H01P7/06 | 主分类号 | H01P5/08 |
| 代理机构 | Maginot, Moore & Beck LLP | 代理人 | Maginot, Moore & Beck LLP |
| 主权项 | 1. A tunable cavity resonator comprising: a substrate; a cap structure extending from the substrate, at least one of the substrate and the cap structure defining a resonator cavity; and a tuning assembly positioned at least partially within the resonator cavity, the tuning assembly including a plurality of fixed-fixed MEMS beams configured for controllable movement relative to the substrate between an activated position and a deactivated position in order to tune a resonant frequency of the tunable cavity resonator. | ||
| 地址 | West Lafayette IN US | ||