Processing liquid supply method, processing liquid supply apparatus and storage medium

摘要

Disclosed are an apparatus and a method for reducing a processing liquid consumed for removing bubbles from a new filter unit, and shortening a start-up time when the filter unit is attached in a processing liquid supply passage. The method includes: filling the processing liquid into a new filter unit, decompressing inside of the filter unit into a first pressure atmosphere in order to remove bubbles from the filter unit, boosting a pressure of the inside of the filter unit, flowing the processing liquid into the filter unit from a primary side of the filter unit, and supplying the processing liquid flowing from the filter unit to an object to be processed through a nozzle thereby performing a liquid processing and quickly removing the bubbles.

主权项

1. A method for supplying a processing liquid in a liquid processing apparatus, comprising:
providing a filter unit including a filtration member in a dried state in the liquid processing apparatus, the filter unit being provided with an introducing port through which the processing liquid is introduced into the filter unit, an external supply port through which the processing liquid is supplied to a nozzle, and a venting port through which an inside atmosphere of the filter unit is exhausted, and each of the external supply port and the venting port is configured to be selectively connected either to a drainage passage or to an exhaust passage; filling the processing liquid into the filter unit by opening the introducing port and the venting port while closing the external supply port, the venting port being connected to the drainage passage draining the processing liquid from the filter unit such that the filtration member of the filter unit is immersed in the processing liquid; continuing the filling of the processing liquid into the filter unit by opening the introducing port and the external supply port while closing the venting port, the external supply port being connected to the drainage passage, thereby continuing the immersing of the filtration member of the filter unit; after the continuing of the filling the processing liquid into the filter unit, decompressing inside of the filter unit into a first pressure atmosphere which is a negative pressure atmosphere lower than a pressure at the time of supplying the processing liquid to an object to be processed, the decompressing being performed by closing the introducing port while opening the external supply port and the venting port, and each of the external supply port and the venting port being connected to the exhaust path thereby removing bubbles from the filter unit; after the decompressing, boosting the inside of the filter unit from the first pressure atmosphere to be atmospheric pressure closing port while opening the external supply port and the venting port, and each of the external supply port and the venting port being connected to the drainage passage; after the boosting, flowing the processing liquid into the filter unit from a primary side of the filter unit in a state where a secondary side of the filter unit is maintained at a second pressure atmosphere which is higher than the first pressure atmosphere but lower than the atmospheric pressure; and after the flowing, supplying the processing liquid flowing from the filter unit to the object to be processed through a nozzle thereby performing a liquid processing.