Three-dimensional profilometer

摘要

Profilometers for industrial metrology and other applications are described. A line is projected on a surface to be profiled. The line is scanned to build a three dimensional point cloud allowing the three-dimensional (3D) profile of the surface to be determined. In some embodiments, the line is projected by a laser system. In other embodiments, the line is projected by a digital micromirror device (DMD). In still further embodiments, multiple lines, or other patterns are projected.

主权项

1. A profilometer, comprising:
a laser light emitter; a scanner configured to direct a laser beam emitted by the laser light emitter; a camera aligned with the scanner to detect light reflected by an object; a processor coupled to the camera and scanner; and a non-transitory computer-readable medium operatively coupled to the processor and having instructions stored thereon that, when executed by the processor, cause the processor to determine a three dimensional profile of the object using a camera output by:
causing the scanner to project a line onto the object;determining a position of a leading edge of the reflected laser light by numerically calculating a first derivative of a peak of the reflected light and selecting a maximum value of the first derivative; andusing the determined position of the leading edge to determine the three dimensional profile of the object.