Measurement apparatus and method, tomography apparatus and method

摘要

An apparatus configured to obtain a physical property of an object by time-domain spectroscopy includes: a detection unit; a delay unit configured to adjust a time difference between generation and detection; a shaping unit configured to collect the electromagnetic wave pulses; a waveform obtaining unit configured to construct a time waveform of the electromagnetic wave pulses; and a collecting position adjusting unit configured to adjust a collecting position. When the collecting position is moved, an amount of adjustment when the collecting position matches first and second reflection portions, respectively, of the object, and a difference by the delay unit required for detecting first and second pulses of the time waveform are obtained, and from an amount of change of the amount of adjustment and the difference, a thickness and a refractive index of a region between the first and second reflection portions of the object are calculated.

主权项

1. A measurement apparatus configured to obtain a physical property of an object to be measured including a first reflection portion and a second reflection portion, comprising:
a generating unit configured to generate electromagnetic wave pulses; a detection unit configured to detect the electromagnetic wave pulses from the object; a delay unit configured to adjust an optical path length difference between a light path length of a first excitation light reaching the generating unit and a light path length of a second excitation light reaching the detection unit, or a time difference between a timing when the first excitation light reaches the generating unit and a timing when the second excitation light reaches the detection unit; a shaping unit configured to collect the electromagnetic wave pulses on the object; a waveform obtaining unit configured to refer to an output from the detection unit and an amount of adjustment of the delay unit to construct a time waveform of the electromagnetic wave pulses; a collecting position adjusting unit configured to adjust a relative position between the object and a collecting position of the electromagnetic wave pulses collected by the shaping unit substantially along an optical axis of the electromagnetic wave pulses; a measurement position information obtaining unit configured to obtain a first position information when an interface between a light collecting process region and a light collimated region of the electromagnetic wave pulses collected in the shaping unit matches the first reflection portion and a second position information when the interface matches the second reflection portion, based on a change of the time waveform obtained in the waveform obtaining unit with a change of the relative position; and a physical property obtaining unit configured to obtain a physical property of a region between the first reflection portion and the second reflection portion based on information of the first position information and the second position information obtained in the measurement position information obtaining unit.