Purification of trichlorosilane

摘要

Systems and methods for removing boron-containing contaminants from a composition comprising trichlorosilane to form a purified product comprising trichlorosilane are disclosed. Purification columns and devices, having various locations of inlet and outlet ports, are fluidly connected to each other in order to remove various types of boron species and other impurities present in TCS.

主权项

1. A method of removing at least one boron-containing contaminant from a composition comprising trichlorosilane to form a purified product comprising trichlorosilane, the method comprising the steps of:
i) partially removing the boron-containing contaminant from the composition by feeding the composition into a first column through an upper inlet port proximal to a top end thereof, and removing from the first column
a) a first top boron-containing contaminant stream through a top outlet port, andb) a partially purified composition comprising trichlorosilane through a bottom outlet port thereof, and ii) feeding the partially purified composition into a purification column through a side inlet port and removing from the purification column
a) a top boron-containing contaminant stream through a top outlet port,b) a bottom boron-containing contaminant stream through a bottom outlet port, andc) a purified composition comprising trichlorosilane through a side outlet port.