Plasma CVD method

摘要

A plasma CVD method uses an electrode array in a reaction chamber, the electrode array including a plurality of inductively coupled electrodes, each electrode being folded back at the center so that each electrode is substantially U-shaped with two parallel straight portions, the electrodes are arranged such that all of the parallel straight portions are arranged parallel to each other in a common plane, each of the electrodes having at least a portion with a diameter of 10 mm or less, and a phase controlled power supply for feeding high frequency power to the feeding portions so as to establish a standing wave of a half wavelength or natural number multiple of a half wavelength between a feeding portion and a folded back portion and between a grounded portion and the folded back portion, and is controlled to have a phase difference between adjacent two feeding portions.

主权项

1. A plasma CVD method comprising:
arranging, in a reaction chamber, an electrode array, the electrode array including a plurality of inductively coupled electrodes arranged in a plurality of electrode layers, each electrode being folded back at a center so that each electrode is substantially U-shaped with two parallel straight portions and having a feeding portion at a first end and a grounded portion at a second end and a folded back portion at the center, the electrodes being arranged such that all of the parallel straight portions are arranged parallel to each other in a common plane, and an entire surface of each of the electrodes being covered with Teflon or alumina, feeding high frequency power to establish a standing wave of a half wavelength or a natural number multiple of a half wavelength between said feeding portions and said folded back portions and between said grounded portions and said folded back portions to generate a plasma of reactive gas introduced in said reaction chamber to form a thin film including at least one element constituting the reactive gas, and setting a phase difference between adjacent two feeding portions of said electrodes to 180 degrees, and wherein a plurality of said electrode layers are arranged such that substrates are arranged on both sides of each electrode layer, and the plurality of said electrode layers are arranged at one interior side of the chamber so that a predetermined gap is formed between the plurality of said electrode layers and another interior side of the chamber opposite to the one interior side.