Method for manufacturing a probe

摘要

A method for manufacturing a probe, includes forming a recess on a sacrificial layer with a resist matching a plane pattern of the probe and a fixing tab connected to the probe, the recess exposing the sacrificial layer, which is on a baseboard, forming the probe and the fixing tab connected to the probe by depositing a probe material in the recess, and removing the resist, removing a portion of the sacrificial layer in an etching process. The portion of the sacrificial layer under the probe is fully removed, while the portion of the sacrificial layer under the fixing tab is left to provide support portions of the sacrificial layer under the fixing tab. Then the probe is removed from the baseboard.

主权项

1. A method for manufacturing a probe, comprising:
forming a recess with a resist, on a sacrificial layer, wherein
the recess has a plane pattern of the probe and a fixing tab connected to the probe,the recess exposes the sacrificial layer, andthe sacrificial layer is located on a baseboard; forming the probe and the fixing tab connected to the probe by depositing a probe material in the recess; removing the resist; removing a portion of the sacrificial layer in an etching process, including fully removing the sacrificial layer between the baseboard and the probe, and leaving a remaining portion of the sacrificial layer between the baseboard and the fixing tab, the remaining portion including a plurality of support portions of the sacrificial layer between the baseboard and the fixing tab supporting the probe and the fixing tab on the baseboard; and removing the probe from the baseboard.