| 摘要 |
An embodiment disclosed in the present invention relates to an apparatus and a method for measuring temperature. A susceptor is formed to support a substrate on a first surface, and a second surface of the susceptor faces the first surface. At least one reflection forming part is formed on the second surface. At least one reflection forming part is arranged in various patterns on a radius observed by a temperature sensor. At least one reflection forming part provides radiation reflection increased from the second surface of the susceptor, and provides more accurate temperature calculation from a thermal signal detected by the temperature sensor. |
