Coating liquid filling method, slit nozzle, discharge outlet closing member, and slit nozzle unit

摘要

A filling method exhausts gas from inside a slit nozzle that applies coating liquid onto a substrate surface while filling the slit nozzle with the coating liquid. The slit nozzle includes a coating liquid supply opening, a coating liquid discharge outlet, a manifold that is connected to the supply opening and holds the coating liquid inside the slit nozzle, a liquid channel that is connected to the manifold and supplies the coating liquid to the discharge outlet of the slit nozzle, and a ventilation hole for exhausting gas from inside the manifold. The filling method includes: a discharge outlet closing process that closes the discharge outlet while the coating liquid is being fed from the supply opening into the slit nozzle; and a ventilation hole opening process that opens the ventilation hole.

主权项

1. A coating liquid filling method that fills an inside of a slit nozzle, which applies coating liquid with a predetermined width onto a surface of a processed object, with the coating liquid,
wherein the slit nozzle includes a supply opening that is a supply portion for the coating liquid, a discharge outlet that is a discharge portion for the coating liquid, a manifold that is connected to the supply opening and holds the coating liquid inside the slit nozzle, a liquid channel that is connected to the manifold and supplies the coating liquid toward the discharge outlet of the slit nozzle, and a plurality of ventilation holes for exhausting gas from inside the manifold, the coating liquid filling method comprising: a feeding process that feeds the coating liquid from the supply opening into the slit nozzle that has not been filled with the coating liquid; a discharge outlet closing process that closes the discharge outlet; a ventilation hole opening process that opens the plurality of ventilation holes a ventilation hole closing process that closes the plurality of ventilation holes the ventilation hole opening process and the ventilation hole closing process are carried out for each ventilation hole, The discharge outlet closing process, the ventilation hole opening process and the ventilation hole closing process are carried out during the feeding process, during a predetermined period of the feeding process, at least one ventilation hole is opened and the other ventilation holes are closed, once the predetermined period has elapsed, one of the closed ventilation holes is opened and the rest of the holes are closed, and during the feeding process, ventilation holes are alternately opened and closed.