Sequential cascading of reaction volumes as a chemical reuse strategy

摘要

A substrate processing system includes one or more processing chambers defining N reaction volumes. N-1 first valves are arranged between the N reaction volumes. A controller communicates with the N-1 first valves and is configured to pressurize a first one of the N reaction volumes with precursor gas to a first target pressure, wait a first predetermined soak period, evacuate a second one of the N reaction volumes to a second target pressure that is lower than the first target pressure, and open one of the N-1 first valves between the first one of the N reaction volumes and a second one of the N reaction volumes.

主权项

1. A substrate processing system comprising:
N processing chambers defining N reaction volumes, wherein N is an integer greater than one; N-1 first valves arranged between the N reaction volumes, wherein a reaction volume refers to a volume in which a substrate is exposed to a precursor gas; a controller in communication with the N-1 first valves and configured to:
pressurize a first one of the N reaction volumes with the precursor gas to a first target pressure;wait a first predetermined soak period;evacuate a second one of the N reaction volumes to a second target pressure that is lower than the first target pressure;open one of the N-1 first valves between the first one of the N reaction volumes and the second one of the N reaction volumes;close the one of the N-1 first valves subsequent to the opening of the one of the N-1 first valves; andintroduce an additional amount of the precursor gas to the second one of the N reaction volumes to achieve a third target pressure after the closing of the one of the N-1 first valves; and N-1 compressors and N-1 second valves arranged between the N reaction volumes, wherein:
the controller is further in communication with the N-1 compressors and the N-1 second valves; andthe controller is configured to:
after evacuating the second one of the N reaction volumes to the second target pressure, open one of the N-1 second valves between the first one of the N reaction volumes and the second one of the N reaction volumes; andoperate one of the N-1 compressors to drive the precursor gas from the first one of the N reaction volumes via one of the N-1 first valves to the second one of the N reaction volumes via one of the N-1 second valves.