发明名称 MASK HOLDING APPARATUS FOR EXPOSURE AND EXPOSURE APPARATUS HAVING THE SAME
摘要 According to an embodiment of the present invention, a mask holder comprises: a first and a second frame equipped with a penetration unit inside; a glass mask equipped on the first and second frames to seal the penetration unit; a sealing member equipped between the first and second frames to form an inner space; and an elasticity support unit including an elastic member inserted in the second frame, and a body unit for supporting a glass mask equipped in the first frame.
申请公布号 KR20150117051(A) 申请公布日期 2015.10.19
申请号 KR20140042292 申请日期 2014.04.09
申请人 SAMSUNG ELECTRO-MECHANICS CO., LTD. 发明人 RA, SEUNG HYUN
分类号 G03F7/20;H01L21/027 主分类号 G03F7/20
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