| 摘要 |
A method for estimating a background component in an obtained image includes the steps of: recording and obtaining an image of a wafer including a defect on a part through an optical device; generating an optical line profile having a frequency form along any one of lines from the obtained image; filtering the generated line profile through a hybrid median filter; and removing a part corresponding to the defect of the wafer from the filtered line profile to estimate the background component of the image. |
