发明名称 VERTICAL MEMORY DEVICES
摘要 A vertical memory device includes channels, gate lines, first separation insulation film patterns, and second separation insulation film patterns. The channels are extended in a first direction perpendicular to the upper side of a substrate. The gate lines are extended to surround the outer sidewalls of the channels, and are separately stacked in the first direction. The first separation insulation film patterns pass through the gate lines in the first direction. The second separation insulation film patterns are formed between the first separation insulation film patterns to face each other, and pass through a part of the gate lines.
申请公布号 KR20150116995(A) 申请公布日期 2015.10.19
申请号 KR20140042123 申请日期 2014.04.09
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 LEE, CHANG HYUN
分类号 H01L27/115;H01L29/78 主分类号 H01L27/115
代理机构 代理人
主权项
地址