| 摘要 |
The present invention relates to a cassette transfer device comprising: a main body supporting a cassette wherein a plurality of substrates are stored, and driving along a predetermined route wherein a lower part of the main body is open; a fan filter unit installed in one side of the main body, forming air current into the main body; and a blocking unit installed along a lower surface of the main body to be able to ascend, opening and blocking a space between the main body and the ground. As such, the cassette transfer device prevents foreign substances from entering the main body. |
