METHOD OF PRODUCING STRUCTURE CONTAINING PHASE-SEPARATED STRUCTURE AND METHOD OF FORMING TOP COAT FILM

摘要

A method for manufacturing a structure comprising a phase separated structure comprises the following processes: forming a layer including a block copolymer on a support body; forming a top coat film by coating a top coat material on the layer including the block copolymer; and phase separating the layer including the block copolymer with the top coat film by heat annealing. The top coat material contains a polymer compound including a composition unit having dicarboxylic acid or salt of dicarboxylic acid, and an organic solvent component (S). The organic solvent component (S) contains water, and alcohol of three or more carbon atoms.