微机电元件;MIRCO-ELECTRO-MECHANICAL SYSTEM DEVICE

摘要

本发明提出一种微机电元件，包含：一基板；一质量块，其内部定义一中空结构，该质量块与该基板构成至少两个感测电容；至少两个锚点结构，连接于该基板，且从剖面图视之，该锚点结构分别落在该至少两个感测电容的电容区域内；至少一个连杆构架，位于该中空结构中，与该锚点结构直接连接、或是藉由缓冲弹簧而与该锚点结构间接连接；以及复数个扭转弹簧，位于该中空结构中，各扭转弹簧一端连接于该质量块，另一端连接于该连杆构架；其中，该至少两个感测电容分别位于该扭转弹簧之两相对侧，该质量块可依该扭转弹簧为轴而旋转，使该至少两个感测电容构成差分感测电容，且其中，在该质量块和该基板的连接关系中，不具有不构成活动电极的质量块。; a proof mass which defines a hollow structure inside and forms at least two capacitors with the substrate; at least two anchors connected to the substrate and respectively located in the capacitor areas of the capacitors from a cross-sectional view; at least one linkage truss located in the hollow structure, wherein the linkage truss is directly connected to the anchors or indirectly connected to the anchors through buffering springs; and multiple torsion springs located in the hollow structure, wherein the torsion springs are connected between the proof mass and the linkage truss, such that the proof mass can rotate along an axis formed by the torsion springs. There is no mass body which does not form a movable electrode in the connection between the proof mass and the substrate.