包括钻石层及钻石、碳化矽与可选的矽之复合层之基板;SUBSTRATE INCLUDING A DIAMOND LAYER AND A COMPOSITE LAYER OF DIAMOND AND SILICON CARBIDE, AND, OPTIONALLY, SILICON

摘要

一种多层基板包括CVD生长在复合层上的钻石层。该复合层包括钻石颗粒和碳化矽与可选的矽。该复合层中的钻石装载水平(依体积计)可以5%；20%；40%；或60%。该多层基板可被用来作为光学元件；用于检测辐射颗粒或电磁波的检测器；用于切割、钻孔、机械加工、碾磨、研磨、抛光、涂布、黏结、或铜焊的装置；制动装置；密封垫；导热器；电磁波传导器；在升温或低温条件下用于腐蚀性环境、强氧化性环境、或强还原性环境的化学惰性装置；或用于抛光或平坦化其它元件、晶圆或膜的装置。;20 %;40 %; or60 %. The multilayer substrate can be used as an optical device; a detector for detecting radiation particles or electromagnetic waves; a device for cutting, drilling, machining, milling, lapping, polishing, coating, bonding, or brazing; a braking device; a seal; a heat conductor; an electromagnetic wave conductor; a chemically inert device for use in a corrosive environment, a strong oxidizing environment, or a strong reducing environment, at an elevated temperature, or under a cryogenic condition; or a device for polishing or planarization of other devices, wafers or films.