发明名称 SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
摘要 The present invention provides a semiconductor device, and a manufacturing method thereof. In the semiconductor device, mechanical properties can be improved since another air gap area does not exist right on and under an air gap area. The semiconductor device comprises: a first wiring layer including first wirings which is arranged on a substrate, and extended in a first direction; a second wiring layer including second wirings arranged by being overlapped with the first wirings on the first wiring layer; and a first air gap area which is arranged on any one among the first wirings and the second wirings, and is not arranged on the other.
申请公布号 KR20150116518(A) 申请公布日期 2015.10.16
申请号 KR20140041160 申请日期 2014.04.07
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 RHA, SANG HO;BAEK, JONG MIN;YOU, WOO KYUNG;AHN SANGHOON;LEE, NAE IN
分类号 H01L21/768 主分类号 H01L21/768
代理机构 代理人
主权项
地址
您可能感兴趣的专利