发明名称 |
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME |
摘要 |
The present invention provides a semiconductor device, and a manufacturing method thereof. In the semiconductor device, mechanical properties can be improved since another air gap area does not exist right on and under an air gap area. The semiconductor device comprises: a first wiring layer including first wirings which is arranged on a substrate, and extended in a first direction; a second wiring layer including second wirings arranged by being overlapped with the first wirings on the first wiring layer; and a first air gap area which is arranged on any one among the first wirings and the second wirings, and is not arranged on the other. |
申请公布号 |
KR20150116518(A) |
申请公布日期 |
2015.10.16 |
申请号 |
KR20140041160 |
申请日期 |
2014.04.07 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
RHA, SANG HO;BAEK, JONG MIN;YOU, WOO KYUNG;AHN SANGHOON;LEE, NAE IN |
分类号 |
H01L21/768 |
主分类号 |
H01L21/768 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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